High vacuum pumps

Maglev turbopumps

New hybrid maglev turbomolecular pump - 500 l/s - With integrated controller ATH 500 M

Maglev hybrid turbomolecular pumps - 400 l/s to 2100 l/s - for SC, coating and other industrial applications ATH-M Series

New Maglev hybrid turbomolecular pump - specifically designed for Photovoltaic applications ATH 3200 M

Maglev turbo molecular pump - for enhanced light gas pumping ATP 2300M

Ceramic ball bearing hybrid turbomolecular pumps - 200 l/s to 300 l/s - for high vacuum applications ATH Series

Turbomolecular ceramic ball bearing pumps - 80 l/s to 900 l/s - for industrial applications ATP Series

Molecular Drag Pumps - 7.5 l/s - for robust pumping solutions until 10-5 mbar MDP 5011